Oxford Instruments - Press Release

Oxford Instruments Plasma Technology (OIPT) announces a significant boost in the demand for its Ionfab®  Ion Beam Etch and Deposition tools, with 2009 being the best year ever for sales of these systems.  Orders for this flexible and versatile tool have been received both for R&D and production applications, from a range of customers worldwide.

These include Ionfab system sales to King Abdullah University of Science and Technology (KAUST) in Saudi Arabia, for R&D; Chalmers University of Technology in Sweden for ultra low temperature R&D etch; CEA LETI, Grenoble, France for R&D; and from a major manufacturer in China for an Ionfab500 System to undertake medium batch optical coating production.

Oxford Instruments’ Ionfab tool allows the flexibility to perform etch and /or deposition and consequently maximises system utilisation. Its specifications can be closely tuned to applications, enabling faster and repeatable process results, and offers functionality in multiple modes: Ion Beam Etching (IBE), Reactive Ion Beam Etching (RIBE), Chemical Assisted Ion Beam Etching (CAIBE), Ion Beam Sputter Deposition (IBSD) and Ion Assisted Sputter Deposition (IASD).

More information at www.oxford-instruments.com